Electron beam induced resonance
US7714513B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2006 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Aug 28, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/954
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
We describe an ultra-small structure that produces visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries can be etched or plated from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.