Versatile system for a locking electro-thermal actuated MEMS switch
US7714691B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 5, 2006 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Jun 22, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2061/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A lockable MEMS switching architecture provided having a clutch assembly, a switching member, and an actuator. The clutch assembly has one or more engagement features located in proximity to the switching member—particularly one or more receiving features located upon the switching member. The clutch assembly is actuated to disengage the engagement features from the receiving features. The switching member is actuated to move in relation to the clutch assembly. Once the switching member is in a desired position, the clutch assembly is de-actuated, causing the engagement features to re-engage with the switching member, thereby restricting its further movement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.