Microscope and microscope microexamination procedure method for the measurement of the surface profile of an object
US7715021B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 17, 2007 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Jun 16, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/24
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a microscope for measuring the surface profile of an object, including (1) an illumination module which directs illumination radiation with different wavelengths to different surface portions of the object in such a way that a predetermined object intersection length range is illuminated for every portion, and (2) a detection module which detects sample radiation of every portion successively in time. Wherein the detection module directs the sample radiation into a detection beam path via a scanner and confocally images another wavelength of the sample radiation in a plane for every intersection length to be detected. The detection module also detects the intensity of the confocally imaged sample radiation in a wavelength-dependent manner and derives therefrom the position of the corresponding surface portion of the object. Wherein the detection module has a color module arranged between the scanner and the plane, through which the sample radiation passes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.