Micro-lens array substrate and production method therefor
US7715104B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 25, 2005 |
| Grant date | May 11, 2010 |
| Priority date | — |
| Expiry date | Jan 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/133526
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
In the micro-lens array substrate of the present invention, a micro-lens array formed of a plurality of consecutive concave lens-shaped micro-lenses is directly formed in a surface of a quartz substrate or glass substrate, and the micro-lens array is formed by a transfer method based on dry-etching. In the micro-lens array substrate of the present invention, a taper portion is formed toward the surface of the substrate in a peripheral portion of the micro-lens array in the quartz substrate or glass substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.