Acceleration sensor device having piezo-resistors measuring acceleration
US7716984B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 14, 2005 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Sep 9, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor device comprising: an acceleration sensor chip comprising a mass portion, a support frame and flexible arms having piezo-resistors on their top surfaces; and an upper regulation plate having an IC circuit, which is larger in area than the support frame, bonded to a top surface of the support frame; wherein the acceleration sensor chip and the upper regulation plate are placed in a protection case with a lid. The regulation plate protrudes from outside walls of the support frame to partition the space accommodating the chip in the protection case by the protrusion and to prevent air circulation above and below the regulation plate, so that a temperature rise due to the IC circuit among the piezo-resistors provided on the top surfaces of the flexible arms is kept uniform to reduce offset voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.