Patent · US Expired

Leak detector comprising a vacuum apparatus

US7717681B2 · kind B2 · utility

9Cited by

7References

4Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Thomas Böhm · Zorneding, DE
Ulrich Doebler · Waiblingen, DE
Ralf Hirche · Cologne, DE
Werner Grosse Bley · Bonn, DE

Key dates

Filing date	Apr 8, 2004
Grant date	May 18, 2010
Priority date	—
Expiry date	Jun 6, 2025

Classification

Technology area (CPC G)Physics
CPC primaryG01M3/202
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A leak detector operating according to the counterflow principle comprises a first high vacuum pump that operates in series with a primary pump. A second high vacuum pump is branched at a connecting point and an entry side thereof is connected to a mass spectrometer. A light test gas in the form of helium flows through the second high vacuum pump in a direction opposite to a transport direction. A conduit connecting an inlet to the entry side of the first high vacuum pump is devoid of restricted flow zones and valves in such a way that the pumping capacity of the leak detector is high for helium, thereby reducing the response time thereof. A valve for blocking the conduit leading via the first high vacuum pump is arranged between the exit side thereof and the entry side of the primary pump.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.