Cleaning sheets and method of cleaning with the same
US7718255B2 · kind B2 · utility
2Cited by
11References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 19, 2003 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Aug 19, 2023 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T442/2738
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The invention provides cleaning sheets for use in cleaning, e.g., various substrate-processing apparatus, systems for conveying exposure masks (reticles) in microfabrication, etc., and a method of cleaning these with the cleaning sheets. A cleaning sheet which comprises a sheet material comprising a thermoset resin layer having porosity and, formed on one side of the sheet material, a pressure-sensitive adhesive layer comprising a thermoplastic resin.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.