Nanostructured titania
US7718552B2 · kind B2 · utility
7Cited by
4References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2006 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Dec 1, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24331
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method and device of nanostructured titania that is crack free. A method in accordance with the present invention comprises depositing a Ti film on a surface, depositing a masking layer on the Ti film, etching said masking layer to expose a limited region of the Ti film, the limited region being of an area less than a threshold area, oxidizing the exposed limited region of the Th.ucsbi film, and annealing the exposed limited region of the Ti film.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.