Microbolometer infrared detector elements and methods for forming same
US7718965B1 · kind B1 · utility
19Cited by
75References
55Claims
0Family size
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Key dates
| Filing date | Aug 3, 2006 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Jul 15, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/046
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Microbolometer infrared detector elements that may be formed and implemented by varying type/s of precursors used to form amorphous silicon-based microbolometer membrane material/s and/or by varying composition of the final amorphous silicon-based microbolometer membrane material/s (e.g., by adjusting alloy composition) to vary the material properties such as activation energy and carrier mobility. The amorphous silicon-based microbolometer membrane material/s materials may include varying amounts of one or more additional and optional materials, including hydrogen, fluorine, germanium, n-type dopants and p-type dopants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.