Sensor having hydrophobic coated elements

US7719004B2 · kind B2 · utility

Assignee

• Micronas GmbH · DE

Inventors

• Markus Burgmair · Regensburg, DE
• Ignaz Eisele · Icking, DE
• Thorsten Knittel · Pentling, DE

Key dates

• Filing date: Feb 1, 2005
• Grant date: May 18, 2010
• Expiry date: May 13, 2025

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L2924/0002
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention concerns a sensor with silicon-containing components from whose sensitive detection element electrical signals relevant to a present analyte can be read out by means of a silicon semiconductor system. The invention is characterized in that the silicon-containing components are covered with a layer made of hydrophobic material in order to prevent unwanted signals caused by moisture.