Nanowire electromechanical device and method of fabricating the same
US7719111B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2006 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Jul 7, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49105
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
A nanowire electronmechanical device with an improved structure and a method of fabricating the same prevent burning of two nanowires which are switched due to contact with each other while providing stable on-off switching characteristics. The nanowire electromechanical device comprises: an insulating substrate; first and third electrodes spaced apart from each other on the insulating substrate, wherein a negative voltage and a positive voltage, varying within a predetermined range, are applied to the first and third electrodes, respectively; a second electrode interposed between the first and third electrodes, a constant positive voltage, lower than the voltage applied to the third electrode, being applied to the second electrode; a first nanowire vertically grown on the first electrode and charged with a negative charge; a second nanowire vertically grown on the second electrode and charged with a positive charge; and a third nanowire vertically grown on the third electrode and charged with an amount of positive charge corresponding to the magnitude of the varying voltage applied to the third electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.