Hybrid planar lightwave circuit with reflective gratings
US7720335B2 · kind B2 · utility
2Cited by
12References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2007 |
| Grant date | May 18, 2010 |
| Priority date | — |
| Expiry date | Jun 7, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12107
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a hybrid planar lightwave circuit in which a silicon reflective diffraction grating etched with a highly accurate deep reactive ion etching process is mounted in a trench formed in a high optical performance silica on silicon waveguide device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.