Approach for fabricating cantilever probes

US7721430B2 · kind B2 · utility

Assignee

• SV Probe Pte. Ltd. · SG

Inventors

• Dov Chartarifsky · Chandler, US
• Edward Laurent · North Wales, US
• Edward L. Malantonio · Conshohocken, US
• Richard D. Sadler · Quakertown, US
• Bahadir Tunaboylu · Chandler, US

Key dates

• Filing date: Feb 21, 2007
• Grant date: May 25, 2010
• Expiry date: Jul 22, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10T29/49222
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An approach is provided for fabricating cantilever probes. The approach generally includes using various techniques to secure a cantilever probe in a manner to allow a tip to be created on the cantilever probe. For example, embodiments of the invention include attaching the cantilever probe to a carrier structure by clamping the cantilever probe to the carrier structure, bonding the cantilever probe to the carrier structure via a post feature on the cantilever probe, or applying a material on the carrier structure and substantially around and in contact with the cantilever probe to affix the cantilever probe to the carrier structure. A probe tip can then be formed on the cantilever probe while the cantilever probe is attached or affixed to the carrier structure. The cantilever probe can then be removed and bonded to a probe substrate.