System and method for improving the precision of nanoscale force and displacement measurements
US7721587B2 · kind B2 · utility
5Cited by
5References
18Claims
0Family size
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Key dates
| Filing date | Mar 12, 2008 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Mar 12, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q40/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus and method for improving the precision of nanoscale force and/or displacement measurements using electro micro metrology (EMM).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.