Flat surface air bearing assembly
US7722256B2 · kind B2 · utility
7Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 17, 2006 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Aug 24, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49998
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
An air bearing assembly includes: an upper portion having a plurality of air supply and vacuum holes therethrough; a lower portion; and a plurality of spacers disposed between and maintaining the upper and lower portions in spaced relation, wherein a density of the air supply and vacuum holes is high enough to provide an air bearing for a substrate, but low enough such that at least one of: (i) a sufficient number of the spacers are employed, and (ii) the spacers are located in close enough proximity, to maintain a substantially uniform flatness of the upper portion relative to the lower portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.