Photodetector arrangement, measurement arrangement with a photodetector arrangement and process for operating a measurement arrangement

US7723668B2 · kind B2 · utility

Assignee

• PRUEFTECHNIK DIETER BUSCH AG · DE

Inventor

• Heinrich Lysen · Garching bei München, DE

Key dates

• Filing date: Mar 23, 2007
• Grant date: May 25, 2010
• Expiry date: Jul 20, 2027

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10F77/957

Abstract

A photodetector arrangement has a semiconductor body with a substrate, and first, second and third layers. The first layer is located at the first main surface of the semiconductor body which is suited for reception of incident photon radiation which is to be detected. The second layer is located at the second main surface of the semiconductor body which is at a distance to the first main surface. The third layer is located between the substrate and the second layer.