Carrier layer for a semiconductor layer sequence and method for producing semiconductor chips
US7723730B2 · kind B2 · utility
6Cited by
7References
28Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 2004 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Nov 29, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10H20/8585
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A carrier layer (1) for a semiconductor layer sequence comprising an electrical insulation layer (2) containing AlN or a ceramic. Furthermore a method for producing semiconductor chips is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.