2-axis driving electromagnetic scanner
US7724411B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 2008 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Nov 12, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/101
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A 2-axis driving electromagnetic scanner, having a structure in which a mirror is separated from a driving unit and directly driven, is provided. The electromagnetic scanner includes: an outer driving unit which is capable of rotating around a first axis; an inner driving unit which is suspended from the outer driving unit so as to rotate around a second axis perpendicular to the first axis; and a stage which is located on an upper surface of the inner driving unit so as to rotate together with the inner driving unit. In the electromagnetic scanner, the stage is connected to the inner driving unit by a link unit protruding from a center of a lower surface of the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.