Method and apparatus for inspecting reticles implementing parallel processing
US7724939B2 · kind B2 · utility
2Cited by
30References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 4, 2006 |
| Grant date | May 25, 2010 |
| Priority date | — |
| Expiry date | Aug 4, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is an apparatus for analyzing a plurality of image portions of at least a region of a sample. The apparatus includes a plurality of processors arranged to receive and analyze at least one of the image portions, and the processors being arranged to operate in parallel. The apparatus also includes a data distribution system arranged to receive image data, select at least a first processor for receiving a first image from the image data, select at least a second processor for receiving a second image from the image data, and output the first and second image portions to their selected processors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.