Plasma generating electrode and plasma reactor
US7727488B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jul 7, 2004 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Oct 10, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01J2219/0875
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A plasma generating electrode 1 of the present invention includes two or more electrodes 2 disposed to face each other, and holding members 3 for holding electrodes 2 at a predetermined interval, and can generate plasma by applying voltage between electrodes 2. At least one of electrodes facing each other 2 has a plate-shaped ceramic body 6 serving as a dielectric body, and a conductive film 7 disposed inside the body 6, and the holding members 3 fix the opposite side end portions 5 (fixed end portions 5a) of electrodes facing each other 2 in the state of a cantilever in such a condition that electrodes 2 are held by holding members in the state of cantilevers of the different directions alternately at a predetermined interval as a whole. This relaxes the thermal stress and effectively prevents distortion and breakage of electrodes caused by to a temperature change.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.