Apparatus for calibrating optical scanner, method of manufacturing the same, and method of calibrating optical scanner using the same
US7727622B2 · kind B2 · utility
1Cited by
6References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 25, 2006 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Apr 3, 2029 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/365
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Provided is a calibration apparatus for an optical scanner, including a substrate on which a molecule capable of forming an excimer is immobilized. A method of manufacturing the calibration apparatus and a method of calibrating an optical scanner using the calibration apparatus are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.