Patent · US Active

Micro-mechanical structure and method for manufacturing the same

US7728395B2 · kind B2 · utility

8Cited by

4References

16Claims

0Family size

Assignee

KOREA ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY · KR

Inventors

Woo Seok Yang · Daejeon, KR
Sung Weon Kang · Daejeon, KR
Youn Tae Kim · Daejeon, KR

Key dates

Filing date	Dec 20, 2004
Grant date	Jun 1, 2010
Priority date	—
Expiry date	Dec 22, 2026

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/112
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

Provided is a micro-mechanical structure and method for manufacturing the same, including a hydrophilic surface on at least a part of a surface of the micro-mechanical structure, so as to prevent generation of an adhesion phenomenon in the process of removing a sacrificial layer to release the micro-mechanical, wherein the sacrificial layer comes into contact with the surface of the micro-mechanical structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.