Patent · US Active

Liquid crystal on silicon micro-display using carbon nanotube

US7728947B1 · kind B1 · utility

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4References
14Claims
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Key dates

Filing dateJan 19, 2009
Grant dateJun 1, 2010
Priority date
Expiry dateJan 19, 2029

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02F2202/36
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A nano-liquid crystal on silicon (nano-LCoS) chip having carbon nanotube (CNT) pillars that are grown on a glass substrate thereof. As the heights of the CNT pillars are uniform, the CNT pillars can function as spacers providing a uniform cell gap between the glass substrate and a silicon chip of the nano-LCoS chip. Also, being excellent electrical conductors, CNT pillars can form a part of the electrical connection between an outside voltage source and the indium tin oxide (ITO) layer formed on the glass substrate. The nano-LCoS chip includes nano-LCoS alignment keys that are formed in the silicon chip and connected to the CNT pillars. By applying the same voltage to the ITO layer and keys, a portion of the liquid crystal activated by the keys become transparent fiduciary marks for optical alignment of nano-LCoS chips.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.