Liquid crystal on silicon micro-display using carbon nanotube
US7728947B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 19, 2009 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Jan 19, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F2202/36
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A nano-liquid crystal on silicon (nano-LCoS) chip having carbon nanotube (CNT) pillars that are grown on a glass substrate thereof. As the heights of the CNT pillars are uniform, the CNT pillars can function as spacers providing a uniform cell gap between the glass substrate and a silicon chip of the nano-LCoS chip. Also, being excellent electrical conductors, CNT pillars can form a part of the electrical connection between an outside voltage source and the indium tin oxide (ITO) layer formed on the glass substrate. The nano-LCoS chip includes nano-LCoS alignment keys that are formed in the silicon chip and connected to the CNT pillars. By applying the same voltage to the ITO layer and keys, a portion of the liquid crystal activated by the keys become transparent fiduciary marks for optical alignment of nano-LCoS chips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.