Cooling station lifter pins
US7730737B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2004 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Jan 1, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
In a cooling station having lifter pins positioned within respective sockets, the lifter pins being positioned for translational movement within platform openings, the improvement comprising forming the lifter pins of aluminum or polymer. A cooling station comprising a cooling station body, a series of sockets affixed to the cooling station body a respective series of lifter pins comprised of aluminum or polymer affixed to the series of sockets, and an platform positioned on the cooling station body. The platform having respective openings positioned above the series of sockets and lifter pins for translational movement of the lifter pins into the platform openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.