Acceleration sensor

US7730783B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Johannes Classen · Reutlingen, DE
• Markus Heitz · Tübingen, DE
• Lars Tebje · Reutlingen, DE
• Fouad Bennini · Reutlingen, DE

Key dates

• Filing date: Nov 13, 2007
• Grant date: Jun 8, 2010
• Expiry date: Jan 25, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01P15/0802
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.