Patent · US Active

Vacuum valve

US7731156B2 · kind B2 · utility

3Cited by
8References
20Claims
0Family size

Assignee

Inventor

Key dates

Filing dateSep 10, 2007
Grant dateJun 8, 2010
Priority date
Expiry dateAug 12, 2028

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/87917
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

A vacuum valve including a valve housing two valve openings, a closure member having two closure plates, a transverse drive unit for adjusting the closure member between an open position and an intermediate position where the closure plates cover the valve openings, a first longitudinal drive unit for adjusting the closure member between the intermediate position and a first closed position, and a second longitudinal drive unit for adjusting the closure member between the intermediate position and a second closed. Each longitudinal drive unit includes a plurality of actuating elements which are guided into the vacuum area of the valve housing. These actuating elements are adjustable by driving elements between a retracted, passive position where their actuating ends are raised from the closure member and an advanced, active position where their actuating ends are pressed against the closure member and press the respective closure plate against the respective valve seat.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.