Method of forming a zinc oxide coated article
US7732013B2 · kind B2 · utility
0Cited by
3References
11Claims
0Family size
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Key dates
| Filing date | May 3, 2007 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Aug 1, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03C2218/152
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The invention described and claimed herein relates to a chemical vapor deposition process for depositing a zinc oxide coating on a substrate by delivering two gaseous precursor streams to a surface of the substrate, and mixing the gaseous precursor streams at the substrate surface for a time sufficiently short so as to form a zinc oxide coating at a deposition rate greater than 5 nm/second.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.