Carbon nanotube transistor process with transferred carbon nanotubes
US7732290B2 · kind B2 · utility
2Cited by
22References
24Claims
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Key dates
| Filing date | Oct 11, 2007 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Nov 13, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/962
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
During fabrication of single-walled carbon nanotube transistor devices, a porous template with numerous parallel pores is used to hold the single-walled carbon nanotubes. The porous template or porous structure may be anodized aluminum oxide or another material. A gate region may be provided one end or both ends of the porous structure. The gate electrode may be formed and extend into the porous structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.