System and method for determining at least one constituent in an ambient gas using a microsystem gas sensor
US7733482B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Mar 26, 2007 |
| Grant date | Jun 8, 2010 |
| Priority date | — |
| Expiry date | Oct 10, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02B30/70
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for measuring air quality using a micro-optical mechanical gas sensor is disclosed. According to one embodiment of the present invention, the system includes an emission source that includes a conduit gap for receiving a gas; a plurality of electrodes for applying an electric field to at least a portion of the conduit gap, the application of the electric field creating a plasma in the conduit gap; and a detector that detects an emission from the plasma. The emission source and the detector may be micro-optical mechanical devices. A method for measuring air quality is discloses. According to one embodiment, the method includes the steps of (1) placing a chip containing an emission source and a detector in a gas flow; (2) applying an electric field to at least a portion of a conduit gap within the emission source, the electric field creating a plasma; (3) detecting an emission from the plasma; and (4) processing data related to the detected emission to determine at least one constituent of the gas flow.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.