Pixelated modulation of illumination pupil image
US7737420B2 · kind B2 · utility
0Cited by
9References
34Claims
0Family size
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Key dates
| Filing date | Mar 30, 2007 |
| Grant date | Jun 15, 2010 |
| Priority date | — |
| Expiry date | Sep 15, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70116
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention describes a method of conditioning radiation upstream from a reticle including: pixelating the radiation, the pixelating involving partitioning into pixels; modulating a first set of the pixels to configure for openings; modulating a second set of the pixels to outline for specific features of the openings; modulating a third set of the pixels to correct for local non-uniformities; modulating a fourth set of the pixels to compensate for global non-uniformities; and modulating a fifth set of the pixels to establish for gray scale.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.