Tunable inter-digital capacitor and method of manufacturing the same
US7738237B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Apr 24, 2007 |
| Grant date | Jun 15, 2010 |
| Priority date | — |
| Expiry date | Apr 7, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/43
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Provided are a tunable inter-digital capacitor (IDC) and a method of manufacturing the same. The tunable IDC includes: a first dielectric layer formed on a substrate and having electrode pattern grooves of an IDC including a ground line and a signal line formed therein; electrode metal patterns formed in the electrode pattern grooves of the IDC including the ground line and the signal line formed in the first dielectric layer; and a second dielectric layer formed on an upper surface of the first dielectric layer to cover all of the electrode metal patterns except for parts of the ground and signal lines. Therefore, it is possible to increase tunability of the IDC and reduce drive voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.