Flow sensor element and its self-cleaning

US7739908B2 · kind B2 · utility

Assignee

• Heraeus Sensor Technology GmbH · DE

Inventors

• Karlheinz Wienand · Aschaffenburg, DE
• Karlheinz Ullrich · Groß-Umstadt, DE
• Matthias Muziol · Seligenstadt, DE

Key dates

• Filing date: Apr 24, 2008
• Grant date: Jun 22, 2010
• Expiry date: Apr 24, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01F1/692
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A flow sensor element and a method for self-cleaning of the flow sensor element are provided, in which a temperature-measuring element and a heating element are arranged on a carrier element, and these elements can form a multiple-part ceramic component. The temperature-measuring element has a platinum thin-film resistor on a ceramic substrate for the temperature measurement and is heated with an additional platinum thin-film resistor. A measurement device, in particular an anemometric measurement device of a flow sensor, contains film resistors mounted in at least one opening of a cover or a hollow body. Two of the film resistors have resistance values differing by one to three orders of magnitude. The anemometric measurement device has a temperature sensor and a heat output sensor set in a carrier element. The temperature sensor has a temperature-measuring resistor and a heat conductor, as platinum thin-film or thick-film resistors, on a ceramic substrate.