Microcantilever infrared sensor array
US7741603B2 · kind B2 · utility
1Cited by
2References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2007 |
| Grant date | Jun 22, 2010 |
| Priority date | — |
| Expiry date | Aug 12, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/40
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A radiation sensor array that exhibits improved fill factor is disclosed. The radiation sensor array incorporates sensors having support arms that are nested in vertical fashion with the support arms of neighboring sensors. This vertically-nested structure enables the radiation-sensing portions of the sensors to be more closely-packed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.