Adaptive-scanning optical microscope
US7742213B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 5, 2007 |
| Grant date | Jun 22, 2010 |
| Priority date | — |
| Expiry date | Jun 21, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/0048
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An adaptive scanning optical microscope has a scanner lens assembly for acquiring images from different parts of an object plane and for forming a preferably curved image field having at least some aberration which varies as a function of the part of the object plane from which the image is acquired. A steering mirror selects the field of view and steers light from the object and along a light path from the object plane to a final image plane. An adaptive optics element receives the steered light from the object and compensates for the field position dependent optical aberrations and additional optics are along at least part of the light path for conditioning and focusing the light as it moves from the steering mirror, past the adaptive optics element and to the final image plane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.