Fiber optic MEMS seismic sensor with mass supported by hinged beams
US7743661B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 12, 2007 |
| Grant date | Jun 29, 2010 |
| Priority date | — |
| Expiry date | Jun 17, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0837
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to an optic seismic MEMS sensor. More specifically, a proof mass is supported by a frame having supporting beams. The proof mass is positioned within the frame and has a hinged attachment to the beams. The proof mass has a sensor gap having a first reflector and a second reflector positioned at opposing ends of the sensor gap. An optical fiber injects light into the sensor gap and light is reflected to determine seismic movement of the proof mass with respect to the frame. Stops are provided for limiting the movement of the proof mass to minimize strain on the attachment of the beams and the proof mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.