Micromechanical sensor having an analyzer circuit
US7746085B2 · kind B2 · utility
0Cited by
7References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 20, 2005 |
| Grant date | Jun 29, 2010 |
| Priority date | — |
| Expiry date | Feb 18, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01D5/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromechanical sensor having an analyzer circuit and at least two detecting elements, each of the two detecting elements being connected to the analyzer circuit by at least one signal line. At least one signal line is connected to both detecting elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.