Determining the position of a semiconductor substrate on a rotation device
US7746482B2 · kind B2 · utility
Inventors
Key dates
| Filing date | Aug 26, 2004 |
| Grant date | Jun 29, 2010 |
| Priority date | — |
| Expiry date | Jan 15, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A device for determining the position of a semiconductor substrate on a rotation device having a rotational axis, including a direction of rotation detecting unit for determining the rotational state of the rotation device, and also including at least one light source and at least one receiver which is photo-sensitive to the light from the light source, wherein at least one light beam emitted by the light source is directed toward the edge of the semiconductor substrate and passes said edge to at least a partial extent. The light of the light beam which has passed to at least a partial extent is then detected at least partially by the receiver.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.