X-ray reflectometry system with multiple sample holder and individual sample lifting mechanism

US7746980B1 · kind B1 · utility

Assignee

• BRUKER AXS GmbH · DE

Inventors

• Rolf Schipper · Karlsruhe, DE
• Eduard Konusch · Bretten, DE
• Rachel Eisenhower · Karlsruhe, DE
• Lutz Bruegemann · Durmersheim, DE

Key dates

• Filing date: Dec 16, 2008
• Grant date: Jun 29, 2010
• Expiry date: Jan 30, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N23/20025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An X-ray reflectometry apparatus comprises an X-ray source (1) configured to emit an incident X-ray beam directed onto a sample measuring position and an X-ray detector (2) configured to detect an X-ray beam (3) reflected from a surface of a selected sample (4) located in said sample measuring position and with a multiple sample holder (5) comprising an essentially horizontal one- or two-dimensional array of sample resting positions into which solid samples can be placed from above. A drive mechanism (6) moves the sample holder in one or two directions within a horizontal plane underneath the sample measuring position in order to place a selected sample (4) directly beneath the measuring position and a sample lift mechanism (7) has a vertically movable piston (8) located below the multiple sample holder (5) beneath the sample measuring position. When the sample lift mechanism (7) is activated, the piston (8) moves upwards against a bottom surface of the selected sample (4) or sample container (9) containing said selected sample (4), lifts the selected sample (4) or sample container (9) until it touches a stop (10) that keeps the sample (4) in the sample measuring position. When the…