Hermetic chamber with electrical feedthroughs
US7748277B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 18, 2006 |
| Grant date | Jul 6, 2010 |
| Priority date | — |
| Expiry date | Oct 18, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An exemplary pressure cavity is disclosed that is durable, stable, and biocompatible and configured in such a way that it constitutes pico to nanoliter-scale volume. The exemplary pressure cavity is hermetically sealed from the exterior environment while maintaining the ability to communicate with other devices. Micromachined, hermetically-sealed sensors are configured to receive power and return information through direct electrical contact with external electronics. The pressure cavity and sensor components disposed therein are hermetically sealed from ambient pressure in order to reduce drift and instability within the sensor. The sensor is designed for harsh and biological environments, e.g., intracorporeal implantation and in vivo use. Additionally, novel manufacturing methods are employed to construct the sensors.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.