High vacuum in-situ refining method for high-purity materials and an apparatus thereof
US7753987B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 11, 2006 |
| Grant date | Jul 13, 2010 |
| Priority date | — |
| Expiry date | Oct 4, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P10/20
- WIPO fieldMaterials, metallurgy
- WIPO sectorChemistry
Abstract
The present invention concerns a high vacuum in-situ refining method for high-purity and superhigh-purity materials and the apparatus thereof, characterized in heating the upper part and lower part of crucible separately using double-heating-wires diffusion furnace under vacuum, thereby forming the temperature profile which is high at upper part and low at lower part of crucible, or in reverse during different stages; then heating the crucible in two steps to remove impurities with high saturation vapor pressure and low saturation vapor pressure respectively in efficiency; and obtaining high-purity materials eventually. The whole procedure is isolated from atmosphere, reducing contamination upon stuff remarkably. The present invention could provide products with high-quality and high production capacity, which are stable in performance, therefore is reliable and free from contamination. The present invention is appropriate for manufacture of high-purity and superhigh-purity materials, particularly for manufacture of high-activity high-purity materials.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.