Tunable microcantilever infrared sensor
US7755049B2 · kind B2 · utility
1Cited by
5References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2007 |
| Grant date | Jul 13, 2010 |
| Priority date | — |
| Expiry date | Mar 20, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/061
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electromagnetic radiation sensor that exhibits improved performance by virtue of an ability to tune its sensitivity is disclosed. The electromagnetic radiation sensor incorporates thermal actuators that act in opposition to one another, but which have a slight difference in responsivity. A temperature controller is used to tune the sensitivity of the electromagnetic radiation sensor by controlling the temperature of the substrate on which the sensor is formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.