Method for manufacturing semiconductor device
US7756600B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2006 |
| Grant date | Jul 13, 2010 |
| Priority date | — |
| Expiry date | Apr 7, 2029 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/611
Abstract
In the case of forming fine wires and the like by a droplet discharging apparatus to manufacture electric circuits, discharging controls including controls of a discharging position, a discharging timing, and the like are required to have very high accuracy. After forming design diagram data of an electric circuit by a CAD tool, the design diagram data is converted into first raster data, which is then converted into second raster data. The first raster data is a square grid regarding a dot pitch Xdp in a horizontal direction and a dot pitch Ydp in a perpendicular direction as one unit. The second raster data is a rectangular grid regarding the dot pitch Xdp in the horizontal direction and a dot pitch Ydp/V (V>1) as one unit. It is to be noted that arbitrary discharging number is the same before and after the conversion from the first raster data to the second raster data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.