Micro-electromechanical nozzle arrangement having cantilevered actuators
US7758161B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 7, 2008 |
| Grant date | Jul 20, 2010 |
| Priority date | — |
| Expiry date | Sep 7, 2028 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49401
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The invention provides for a micro-electromechanical nozzle arrangement for an inkjet printhead. The arrangement includes a substrate defining an inverted pyramidal ink chamber with a vertex thereof terminating at an ink supply channel defined by the substrate, said substrate having a layer of CMOS drive circuitry. The arrangement also includes a roof structure connected to the drive circuitry layer and covering the ink chamber, the roof structure defining a fluid ejection nozzle rim above said chamber. Also included is a plurality of actuators fast with and displaceable with respect to the roof structure, the actuators radially spaced about the nozzle rim between the guide rails. Each actuator has a serpentine heater element configured to expand thermally upon receiving current from the drive circuitry thereby moving said actuators into the chamber to increase a fluid pressure inside the chamber to eject a drop of ink via the ejection nozzle. Each actuator is cantilevered to a heater element in a bendable manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.