Temperature measurement with reduced extraneous infrared in a processing chamber

US7758238B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventors

• Sridhar Govindaraju · Hillsboro, US
• Karson Knutson · Beaverton, US
• Harold W. Kennel · Portland, US
• Aravind S. Killampalli · Hillsboro, US
• Jack Hwang · Portland, US

Key dates

• Filing date: Jun 30, 2008
• Grant date: Jul 20, 2010
• Expiry date: Jul 2, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J5/0806
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Temperature measurement using a pyrometer in a processing chamber is described. The extraneous light received by the pyrometer is reduced. In one example, a photodetector is used to measure the intensity of light within the processing chamber at a defined wavelength. A temperature circuit is used to convert the measured light intensity to a temperature signal, and a doped optical window between a heat source and a workpiece inside processing chamber is used to absorb light at the defined wavelength directed at the workpiece from the heat source.