Methods of producing structures for electron beam induced resonance using plating and/or etching

US7758739B2 · kind B2 · utility

Assignee

• Virgin Islands Microsystems, Inc.

Inventors

• Jonathan Gorrell · Gainesville, US
• Mark Davidson · Florahome, US
• Jean Tokarz · Bonita Springs, US
• Michael E. Maines · Gainesville, US
• Andres Trucco · Gainesville, US
• Paul Hart · Houston, US

Key dates

• Filing date: May 15, 2006
• Grant date: Jul 20, 2010
• Expiry date: Mar 2, 2029

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/954
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

We describe an ultra-small structure and a method of producing the same. The structures produce visible light of varying frequency, from a single metallic layer. In one example, a row of metallic posts are etched or plated on a substrate according to a particular geometry. When a charged particle beam passed close by the row of posts, the posts and cavities between them cooperate to resonate and produce radiation in the visible spectrum (or even higher). A plurality of such rows of different geometries are formed by either etching or plating from a single metal layer such that the charged particle beam will yield different visible light frequencies (i.e., different colors) using different ones of the rows.