Fabry-perot interferometric MEMS electromagnetic wave modulator with zero-electric field
US7760197B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 31, 2005 |
| Grant date | Jul 20, 2010 |
| Priority date | — |
| Expiry date | May 20, 2029 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems, methodologies, and other embodiments associated with a micro-electrical-mechanical system (MEMS) Fabry-Perot interferometric device (FPID) are described. Fabricating a MEMS FPID may include fabricating a pixel plate and a reflector plate so a Fabry-Perot cavity is defined therebetween. Fabrication may include producing a capacitor plate that facilitates electrostatically moving the pixel plate. Fabrication may include producing electrical connections between plates and producing circuitry to control plate voltages to facilitate creating an electrostatic force between plates. The MEMS FPID may include stops fabricated from a conductive material and circuitry for maintaining the stops and plates at an electrical potential that will yield a zero electric field contact event.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.