Decoupled, multiple stage positioning system
US7760331B2 · kind B2 · utility
1Cited by
3References
27Claims
0Family size
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Key dates
| Filing date | Feb 20, 2007 |
| Grant date | Jul 20, 2010 |
| Priority date | — |
| Expiry date | May 21, 2029 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB23K2101/40
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A split axis stage architecture is implemented as a multiple stage positioning system that is capable of vibrationally and thermally stable material transport at high speed and rates of acceleration. A split axis design decouples stage motion along two perpendicular axes lying in separate, parallel planes. A dimensionally stable substrate in the form of a granite, or other stone slab, or of ceramic material or cast iron, is used as the base for lower and upper stages. The substrate is precisely cut (“lapped”) such that its upper and lower stage surface portions are flat and parallel to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.