Patent · US Active

Method for consistent updates to automated process control (APC) models with partitioning along multiple components

US7761179B2 · kind B2 · utility

2Cited by
12References
13Claims
0Family size

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Key dates

Filing dateSep 24, 2007
Grant dateJul 20, 2010
Priority date—
Expiry dateDec 23, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG05B17/02
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.