Method of forming a micromechanical system containing a microfluidic lubricant channel
US7763489B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2006 |
| Grant date | Jul 27, 2010 |
| Priority date | — |
| Expiry date | May 15, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Embodiments of the present invention generally relate to a electromechanical device that has an improved usable lifetime due to the presence of one or more channels that contain and deliver a lubricant material that can reduce the likelihood of stiction occurring between the various moving parts of the device. Embodiments of the present invention also generally include an enclosed device package, and a method of forming the enclosed device package, that has one or more lubricant containing and/or transporting channels that that deliver lubricant material to a device disposed within the enclosed device package. Each lubricant containing channel acts as a ready supply of “fresh” lubricant to prevent stiction from occurring between interacting components of the device disposed within the enclosed region of the device package. The ready supply of “fresh” lubricants may also be used to replenish damaged lubricants (worn-off, broken down, etc) at the contacting surfaces where stiction generally occurs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.