Hard-material-coated bodies and method for their production

US7767320B2 · kind B2 · utility

Assignee

• Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventor

• Ingolf Endler · Coswig, DE

Key dates

• Filing date: Jul 4, 2006
• Grant date: Aug 3, 2010
• Expiry date: Jan 20, 2027

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C30/00
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The invention relates to hard-coated bodies with a single- or multi-layer system containing at least one Ti1-xAlxN hard layer and a method for production thereof. The aim of the invention is to achieve a significantly improved wear resistance and oxidation resistance for such hard-coated bodies. Said hard-coated bodies are characterised in that the bodies are coated with at least one Ti1-xAlxN hard layer, generated by CVD without plasma stimulation present as a single-phase layer with cubic NaCl structure with a stoichiometric coefficient x>0.75 to x=0.93 and a lattice constant afcc between 0.412 nm and 0.405 nm, or as a multi-phase layer, the main phase being Ti1-xAlxN with a cubic NaCl structure with a stoichiometric coefficient x>0.75 to x=0.93 and a lattice constant afcc between 0.412 nm and 0.405 nm, with Ti1-xAlxN with a wurtzite structure and/or as TiNx with NaCl structure as further phase. Another feature of said hard layer is that the chlorine content is in the range of only 0.05 to 0.9 atom %. The invention further relates to a method for production of the body, characterised in that the body is coated in a reactor at temperatures from 700° C. to 900° C. by means of CVD w…